Description
The ams micro-hotplate technology provides a unique silicon platform for the CCS80x range of Metal Oxide (MOX) gas sensors. These devices enable sensor miniaturization, have ultra-low power consumption and provide fast response times due to the ability to heat the micro-hotplate very quickly.The micro-hotplates are fabricated using a robust silicon dioxide membrane and include an embedded tungsten heating element to heat the MOX based sensing material.
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