MEMS alcohol gas sensor GM-302B uses MEMS process to produce micro hotplate on Si based substrate. The gas sensing material used is a metal oxide semiconductor material with lower conductivity in clean air. When the sensor is in the gas environment, the conductivity of the sensor changes with the concentration of the detected gas in the air. The higher the concentration of the gas, the higher the conductivity of the sensor. A simple circuit is used to convert the electrical conductivity into an output signal corresponding to the gas concentration.
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