MEMS combustible gas sensor is using MEMS micro-fabrication hot plate on a Si substrate base, gas-sensitive materials used in the clean air with low conductivity metal oxide semiconductor material. When the sensor exposed to gas atmosphere, the conductivity is changing as the detected gas concentration in the air. The higher the concentration of the gas, the higher the conductivity. Use simple circuit can convert the change of conductivity of the gas concentration corresponding to the output signal.
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